埃德萬斯：智能制造風口籌謀中國“彎道超車”

2016年10月27日 10:26:49 來源： 中華工商時報

    離子束應用系統(tǒng)躋身高端制造改變長期缺“芯”被動格局

　埃德萬斯，英文的意思為先進的。

　　今年以來，在蘇州的第二屆中國半導體行業(yè)協(xié)會MEMS分會市場年會、上海的全球智能制造大會、北京的第二屆中國制造2025與工業(yè)4.0全球年會等專業(yè)峰會上，北京埃德萬斯離子束技術研究所股份有限公司步入了公眾的視野，它獨有的尖端設備和高端制造解決方案，讓業(yè)界為之一振：中國原來有如此的利器，并能驅動非硅產業(yè)進而助推制造業(yè)的轉型升級。

　　身為埃德萬斯的統(tǒng)帥，刁克明志存高遠。面對業(yè)界投來的期許目光，他和他的團隊有一種愈加強烈的使命感。當下階段，高端裝備之爭已上升為大國之間博弈的核心和不可或缺的重器。“下一步，于智能制造風口上籌謀中國在非硅微納米制造‘彎道超車’。”埃德萬斯將主攻方向鎖定。

　　躋身高端制造打出中國“芯”

　　上個月，備受關注的上海全球智能制造大會如期開幕。工信部電子信息司司長刁石京專程來到埃德萬斯站臺并詢問柔性基底上微納米鍍膜這一工業(yè)制造的新興課題，刁克明詳細介紹了這一解決之道。

　　柔性基底上微納米鍍膜是現(xiàn)實未來可穿戴系統(tǒng)的前提，新型功能材料薄膜制造更代表著當今世界高端制造的發(fā)展趨勢之一，而這一設備制造和工藝技術長期被德美等制造強國所把持，現(xiàn)在這一壟斷被埃德萬斯徹底打破，并后來居上獲得這一領域的“話語權”。

　　始創(chuàng)于新世紀元年的埃德萬斯，前身為原航天部系統(tǒng)的一個科研機構，上世紀80年代自主研發(fā)了國內首臺商用成套離子束刻蝕機、離子束濺射鍍膜機，被當時國家機械委定位“取代進口和供出口產品”。此后始終瞄準世界前沿科研的發(fā)展方向，并在這一基礎上創(chuàng)造了離子束應用工藝技術體系。

　　目前，由離子束綜合應用系統(tǒng)“打磨”的微納米器件，更多被用于上天入海、高熱高寒、復雜電磁環(huán)境、強腐蝕性條件等特殊領域。因而，這一利器在業(yè)界有后工業(yè)時代開啟智能制造的潘多拉之盒的美譽。

　　多年來，由于一些特殊需要和要求，埃德萬斯一直“低調”前行，默默地服務于國內航空、航天、兵器等軍工領域并提供技術解決方案，后延伸到國內頂尖級的科研院校。伴隨“中國工業(yè)2025”戰(zhàn)略的發(fā)布，這家企業(yè)才浮出水面，從軍工走向民用。

　　傳感器被視為物聯(lián)網的“心臟”。據一項研究報告披露，“缺芯”的中國，不但傳感器生產基礎薄弱，而且高端傳感器芯片更要依賴全部進口，僅去年芯片產業(yè)進口花費就高達2307億美元，為原油進口總額的1.7倍，已連續(xù)多年成為第一大進口商品。

　　MEMS（微機電系統(tǒng)）是微納米制造領域新方向，同時MEMS又是傳感器發(fā)展的新導向，因為它能滿足超薄超微、集中度高等要求。“制造高端”，天降大任于埃德萬斯。手握這一利器，這家企業(yè)當下肩負起國內MEMS傳感器芯片打造重任，并緊跟國際前沿在已開始大規(guī)模應用的非硅MEMS傳感器芯片制造上扮演先行者的角色。

　　值得關注的是，以美國為首的西方國家，目前研發(fā)制造平臺單家擁有的離子束應用設備均不超過50臺，而埃德萬斯已具備百臺數量規(guī)模。“由離子束綜合應用體系為核心而形成的綜合解決方案的開放平臺，這更有助于改變中國制造長期缺“芯”的被動局面。”上海交大微納米學院原副院長趙大林這樣評價。

　　架構跨界科創(chuàng)驅動平臺

　　今年“兩會”上，工信部部長苗圩首次對外發(fā)布中國從制造業(yè)大國向制造業(yè)強國轉變的時間表，大體需要用3個10年來完成并提出了分三步走的戰(zhàn)略。

　　“中國制造2025”是三步走戰(zhàn)略第一個十年的行動綱領，與德國“工業(yè)4.0”確立的目標大體相一致，主攻方向都是智能制造。“‘德國制造’最核心的價值是完善的創(chuàng)新驅動體系及頂層設計，這是中國更應該去對標的。”國家863計劃MEMS重大專項總體組組長孫立寧發(fā)出告誡。

　　從京城驅車往北，沿海淀區(qū)地錦路便可抵達中關村環(huán)�？萍紙@，埃德萬斯正在構建的非硅產業(yè)工藝技術研發(fā)集群就坐落于其中。大概是看中這家高科技企業(yè)的獨有優(yōu)勢和潛在價值，中關村管委會給予了不少優(yōu)惠政策。

　　“我們更看中這里無可比擬的科創(chuàng)孵化器的生態(tài)環(huán)境。”刁克明坦言。入住中關村前，埃德萬斯已悄然確立了一個架構跨界創(chuàng)新驅動平臺的戰(zhàn)略，這是在充分吸收和借鑒德國“工業(yè)4.0”的聯(lián)合模式基礎上設計的。

　　據了解，這一戰(zhàn)略概括為“1+1+1”，即：一個發(fā)展高附加值制造業(yè)的科技創(chuàng)新聯(lián)盟；一個非硅MEMS創(chuàng)新的實驗基地；一個打造后工業(yè)時代工匠的示范工廠。

　　早在上世紀80年代，埃德萬斯開始向中科院、航天科工、中電科、清華大學、上海交大等國內一大批科研院所和高等學校輸出利器，并輻射到物理、化學、光學、電子、生物、磁學、超導、紅外等基礎科學領域最前沿的研究，實質上這是一個“隱形”的科創(chuàng)平臺。

　　“在整合基礎上，將這一知本平臺平移并對接到產業(yè)之中，鍛造一個產、學、研、用并聯(lián)的技術研發(fā)集群，補上先導型高技術開發(fā)落后的短板，更好地適應未來智能制造引發(fā)的生產模式和產業(yè)形態(tài)的重大變革。”刁克明自信地說。

　　非硅MEMS助力中國“彎道超車”

　　每一次工業(yè)革命的到來，都伴隨新材料的先期出現(xiàn)。上世紀中葉硅材料的大規(guī)模應用，在工業(yè)上帶來一次革命，由此步入了微納米時代。此后隨大規(guī)模集成電路飛速更新迭代，時下硅材料正逐漸接近5納米的理論極限，人們稱之為“摩爾定律的黃昏”。

　　值得關注的是，在構建微納米制造為產業(yè)變革平臺后，西方制造強國舉全力加快MEMS發(fā)展。“在那個倡導引進、消化、吸收的特殊時代，中國跟在大規(guī)模集成電路的舊途上追趕，并至少落后30年。”英特爾（中國）戰(zhàn)略合作部原總經理龐軍分析指出。

　　國際權威機構Yole研究表明，步入2000年，西方制造強國在硅材料研究與應用上逐漸開始下降。在近10年中，德國的博世、美國的德州儀器、意大利的意法半導體在傳感器上已側重非硅開發(fā)與應用，而這三家巨頭占整個世界MEMS傳感器市場半數天下。

　　機會總是留給又準備的人。時間退到上世紀70年代末，現(xiàn)任埃德萬斯首席科學家的劉金聲，被“中國航天之父”錢學深欽點為航天離子束推進器的研發(fā)小組做負責人，一舉奠定了中國離子源理論發(fā)展體系，更移植到離子束創(chuàng)新應用上。

　　仿佛有老天在眷顧埃德萬斯，這一離子束綜合應用體系在當今非硅材料加工大趨向上占具了獨到優(yōu)勢，從而使這家企業(yè)所當然掛上了開啟中國非硅大時代的鑰匙，被業(yè)界稱為中國非硅產業(yè)的“仙童半導體”。

　　站在時代前沿，埃德萬斯有了與眾不同的視野。在刁克明看來，當下中國制造業(yè)最尖端產業(yè)與最落后產業(yè)并存的現(xiàn)狀，這并不表示只能永遠跟在“德國制造”后面。既然已站在智能制造大趨勢風口上，只要“路徑選對”，后發(fā)先至更有可能。

　　早在今年5月，埃德萬斯牽頭起草了國內首個《關于中國構架非硅MEMS發(fā)展戰(zhàn)略的報告》，并在報告中建議“布局智能制造，要關注微納米制造領域中MEMS整體發(fā)展，對非硅MEMS作適度加法，對MEMS作適度減法。”

　　更值得關注的是， 資本市場已經悄然鎖定埃德萬斯。今年以來，國內一些知名投資公司密集對接這家企業(yè)。在這些投資人眼中，誰占有趨勢，誰就將擁有未來。（記者周勇剛）

ADVANCED:Intelligent Manufacturing Plan Chinese Outlet

This year, the second in Suzhou Chinese Semiconductor Industry Association MEMS branch market annual meeting, Shanghai's global Intelligent Manufacturing Conference, Beijing second session of the 2025 and 4 China manufacturing industry annual global professional summit, Beijing Limited by Share Ltd advanced ion beam technology research institute has entered the public view, sophisticated equipment and high-end it unique manufacturing solutions, let the industry lifted: there is so Chinese tool, and can drive the transformation and upgrading of non silicon industry and thus boost the manufacturing industry.

As the ADVANCED commander, Diao Keming lofty. In the face of expectations from the industry, he and his team have an increasingly strong sense of mission. At this stage, high-end equipment dispute has risen as the core country between the game and indispensable jack. "The next step in intelligent manufacturing plan Chinese outlet in non silicon micro nano manufacturing" overtaking "." The main target will be locked.

Among the high-end manufacturing, playing China's core"

Last month, the Shanghai global Intelligent Manufacturing Conference, which attracted much attention, opened as scheduled. Ministry of industry and electronic information division director Diaoshi Beijing made a special trip to the station and asked the advanced flexible substrate micro nano coating of emerging topics in this manufacturing industry, Diao Keming introduced a solution.

Flexible substrate micro nano coating is a realistic future wearable system of the premise, the new functional material film manufacturing more represents one of the development trend of the world's high-end manufacturing, the manufacturing equipment and technology has long been dominated by German manufacturing power, now the monopoly was broken and advanced, catch up from behind "the right to speak get this field".

Founded in the first year of the new century advanced, formerly known as a scientific institution the original Department of space systems, in 80s developed the first domestic commercial complete sets of ion beam etching, ion beam sputtering machine, by the then national machinery committee positioning "and for export products to replace imports". Since then, we have always aimed at the development direction of the world's cutting-edge scientific research, and in this foundation created the ion beam application technology system.

At present, micro nano devices which are polished by ion beam integrated application system are more used in such special fields as heaven into the sea, high temperature, high cold, complex electromagnetic environment and strong corrosive conditions. Therefore, this tool has the reputation of "Pandora's box" of Intelligent Manufacturing in the post industrial era.

Over the years, because of some special needs and requirements, has been advanced "low-key" forward, quietly serving the domestic aviation and aerospace, weapons and other military areas and provide technical solutions, after extending into the domestic top level scientific research institutions. Accompanied by the "China industry 2025" strategy released, the enterprise surfaced, from military to civilian.

Sensors are regarded as the heart of the Internet of things". According to a research report revealed that the lack of core "Chinese, not only based sensor production is weak, and the high-end sensor chip depends on all imports, only last year, the chip industry import costs up to $230 billion 700 million, 1.7 times of crude oil imports, has become the first major imported goods.

MEMS (micro electro mechanical system) is a new direction in the field of micro nano manufacturing. At the same time, MEMS is the new direction of sensor development, because it can meet the requirements of ultra thin, ultra micro, high concentration. "High-end manufacturing", it has fallen to advanced. With this tool, the current domestic enterprises shoulder MEMS sensor chip to create a task, and keep up with the international frontier has begun to play the role of pioneer in the large-scale application of non silicon MEMS sensor chip manufacturing.

It is noteworthy that the western countries headed by the United States, the current R & D and manufacturing platform with single ion beam applications are not more than 50 units, and has advanced 100 Taiwan number scale. "An open platform for integrated solutions based on the integrated application system of ion beams, which helps to change the passive situation in which China has long been lacking in" core "." Shanghai Jiaotong University Institute of micro nano Zhao Dalin, former vice president of such evaluation.

Cross platform architecture driven by

This year's "two sessions", the Ministry of industry minister Miao Wei first announced the timetable for China's shift from a manufacturing power to a manufacturing power, generally need to use 3 10 years to complete, and proposed a "three steps" strategy.

"Made in China 2025" is the three step strategy, the first ten years of action program, and the German "industrial 4" established goals roughly consistent, the main direction is intelligent manufacturing. The core value of "made in Germany" is a sound innovation drive system and top-level design, which is China should be more benchmarking." National 863 plan MEMS major special team leader Sun Lining issued a warning.

From the capital driving north, along the Haidian District road test can be reached in Zhongguancun environmental science and Technology Park, non silicon industry technology research and development advanced cluster are building is located in the. Perhaps the unique advantages and potential value of this high-tech enterprise, Zhongguancun CMC has given a lot of preferential policies.

"We see here by the ecological environment There is nothing comparable to this incubator." Diao Keming admits. In Zhongguancun, has quietly established advanced drive platform a framework of cross-border innovation strategy, which is to fully absorb and learn from the design of the German industrial 4 joint model based on.

It is understood that this strategy is summarized as "1+1+1", that is: a development of high value-added manufacturing alliance of scientific and technological innovation; a non silicon MEMS Chong